ISSN 0236-235X (P)
ISSN 2311-2735 (E)

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Higher Attestation Commission (VAK) - К1 quartile
Russian Science Citation Index (RSCI)

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4
Publication date:
09 September 2024

Keyword: double pattern technology

  1. Software for double pattern technology layout migration
  2. Authors: Зинченко Л.А., Аверьянихин А.Е.